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Referenced SEMI Standards (Purchase separately)
6-81 (first published)
3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
as well as specific models for each
E15600 - SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment Revision:SEMI E156-1115 - Inactive Referenced SEMI Standards (Purchase separately)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to define interfaces between automated material handling systems (AMHS) stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier
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